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piezoresisitive nanomechanical sensor

Piezoresisitive nanomechanical sensor for artificial- (electric-) nose or sniffer applications added to the Special Development list

The Membrane-type Surface Stress Sensor (MSS) is a device to detect specific components in gaseous phase with high sensitivity using a piezoresisitive nanomechanical sensor. This device shows great potential as a core component for artificial- (electric-) nose or sniffer applications utilized in e.g., medical, food, environment, safety and security fields.

MSS works according to the following principle : A receptor layer coated on the silicon membrane of a nanomechanical sensor yields surface stress upon absorption/adsorption of target molecules.