NANOSENSORS 公司 – 原子力显微镜探针的发展史

The screencast on the history of NANOSENSORS AFM probes is now available in Chinese on youtube  and youku

NANOSENSORS 公司 – 原子力显微镜探针的发展史

在 Youtube

和在 Youku


1981年,在IBM 苏黎世研发中心,Heinrich Rohrer和Gerd Binning 研发了一种新型的显微镜:扫描隧道显微镜。现今,最为广泛使用的是由Gerd Binning, Calvin Quate和Christoph Gerber于1986年发明的原子力显微镜。原子力显微镜使用了一根在末端有非常尖­锐针尖的悬臂,该悬臂在材料表面进行线状扫描。并通过激光技术精密地测量悬臂的位移,­从而在原子级别上检测材料表面的拓扑结构。

1990年,在德国Sindelfingen的IBM中心,Olaf Wolter博士首次使用单晶硅来制作原子力显微镜探针,并命名其为Wolter探针­。 1991年,Wolter成立了NANOSENSORS公司,将该探针投入工业化量产­。


随着原子力显微镜的改进,许多新的测量模式得到了发展,NANOSENSORS首先开­发了以下的多用途探针:为磁力显微镜特别定制的探针(MFM,1995),超硬尖端探­针(金刚石,1999),导电原子力显微镜(导电金刚石针尖,1999),高分辨率测­量(超尖硅探针,1997),半导体制造中的亚微米特征的测量(高深宽比针尖,199­8 以及 倾斜补偿的高深宽比针尖,2000),顶端可视针尖(Advanced TEC,2003),自驱动自感应AFM探针(Akiyama探针,2008),耐磨­的高分辨率导电AFM探针(铂硅针尖,2011)以及可运用于生物和生命科学应用的拥­有高度均一性的力常数的软悬臂(Unique Probes,2013年)。


NANOSENSORS™ Ultrastiff AFM Probes for Atomic Resolution

Dr. Oliver Krause, product developer at NANOSENSORS™ is talking in this screencast about AFM probes for dynamic AFM with sub-nanometer amplitudes enabling imaging with atomic and sub-nanometer resolution

Dynamic AFM with extremely small oscillation amplitudes of the probing tip enables Atomic Force Microscopy with atomic and even sub-atomic resolution. By adjusting the oscillation amplitude to the regime of short-range forces the impact of long-range forces on the detection mechanism can be suppressed effectively.
For stable operation the bending forces of the cantilever must be able to overcome the attractive tip-sample forces. Dynamic AFM with sub-nanometre amplitudes requires cantilevers with a force constant larger than 300N/m. The force constants of typical AFM probes for intermittent contact (Tapping Mode) are in the order of a few tens of N/m. Therefore, amplitudes of at least a few nanometres are required for stable operation.
Ultrastiff AFM cantilever probes with integrated sharp tips have been fabricated based on the well-established NANOSENSORS™ PointProbePlus® process. Cantilever geometries of 100µm length and 7 or even 10µm thickness have been realized resulting in force constants of 600 and 2000 N/m.

Calibration service for AFM Cantilever

NANOSENSORS™ screencast on the service for Calibration for AFM Cantilevers, presented by Wolfgang Engl.

Accurately determined cantilever properties are very important for quantitative force measurements. Force constant and resonance frequency are determined either by thermal tune, the Sader- or the dimensional method, respectively. Usually, the thermal tune method delivers the most precise values, but suffers from the fact that the AFM tip has to get in contact to the urface to calibrate the photo-detector sensitivity. This procedure may damage or break the tip!

NANOSENSORS™ offers a thermal tune calibration procedure performed by Laser vibrometry. This method is contact free and therefore does no damage the tip, but preserves the original AFM tip quality. To ensure the highest level of accuracy NANOSENSORS™ cantilever calibration method is calibrated with a standard, certified by the national German metrology institute.

This service is part of our Special Development List
More information at info@nanosensors.com