2D200

Lateral-(XY)-Calibration Standard

The standard (2D200) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 300nm pitch etched into a silicon chip.

Features:

  • 200 nm pitch
  • high accuracy


The silicon chip is glued onto a stainless steel sample holder with 12 mm diameter. This holder can be magnetically or mechanically fixed. The product will be shipped in a Gel-Pak® carrier.

This standard has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this standard in accordance with international guidelines. Please contact Working Group 5.25 Scanning Probe Metrology at www.ptb.de directly.

Gel-Pak® is a registered trademark of Delphon Industries

 

  
Chip 
Chip size 5 x 7 mm²
Active area 100 x 100 µm²
The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area.
Lattice 
Pitch 200 nm
Accuracy of pyramid position 10nm
Accuracy of pitch (10x10 µm² scan) 0.1%
Accuracy of pitch (100x100 µm² scan) ±0.01%
Pyramids 
Edge length of square pyramids approx. 50 nm
Sidewall angle (versus wafer surface) 54.7°
Accuracy of sidewall angle 0.5
Depth of pyramids approx. 70 nm
Order CodeQuantityData sheet
2D200 1 enclosed