AFM probe, Atomic Force Microscope (AFM) probes

AFM Probes, Atomic Force Microscope Tips

Product Overview
Selected by Product Series

AdvancedTEC™	PointProbe® Plus	PointProbe® Plus XY-Alignment ( NEW )	SuperSharpSilicon™
High Aspect Ratio	Rotated Tip	Plateau Tip ( NEW )	Tipless Cantilever
Platinum-Iridium coated	Magnetic Coating ( NEW )	Diamond coated	Gold Coating ( NEW )
Special Developments	Alignment Chip	Metrology Standards

AdvancedTEC™ Series

AdvancedTEC™

• Monolithic Silicon-AFM-Probes for very high resolution imaging

• Fits to all well known AFMs

• Highly doped single crystal silicon (0.01-0.025 Ohm*cm)

• Rectangular cantilever with trapezoidal cross section

• Holder dimensions are 1.6 mm x 3.4 mm

• REAL TIP VISABILITY FROM TOP

• Tip height 15-20 µm

• Typical tip radius of curvature < 10 nm

• Aspect Ratio of the last 1.5 µm of the tip > 4:1 (from front and side)

• Tip shape is defined by real crystal planes resulting in highly reproducible
geometries and extremely smooth surfaces

Available Types

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PointProbe® Series

PointProbe® Plus	• Monolithic Silicon AFM Probes for very high resolution imaging • Fits to all well-known AFMs • Highly doped single crystal silicon (0.01-0.025 Ohm*cm) • Rectangular cantilever with trapezoidal cross section • Holder dimensions are 1.6 mm x 3.4 mm • Tip radius typically better than 7 nm • Improved consistency and resolution • Minimized variation in tip shape	Available Types Download Flyer

PointProbe® Plus XY-Alignment	• When used together with the Alignment Chip, probes of three different cantilever lengths (e.g. PPP-NCHR; PPP-XYCONTR and PPP-FMR) can be exchanged without readjustment of the beam deflection laser • Monolithic Silicon AFM Probes for very high resolution imaging • Fits to all well-known AFMs • Highly doped single crystal silicon (0.01-0.025 Ohm*cm) • Rectangular cantilever with trapezoidal cross section • Tip radius typically better than 7 nm • Improved consistency and resolution • Minimized variation in tip shape	Available Types Download Flyer

SuperSharpSilicon™	• For enhances resolution of micro roughness and nanostructures • Tip radius is typically better than 2 nm	Available Types Download Flyer

High Aspect Ratio Tip	• The length of the high aspect portion of the tip is larger than 1.5 µm or 2 µm respectively • Special tips are available to compensate the tilt of the scanner-head • The tip radii are typically better than 10 nm. We guarantee at least 15 nm • The overall tip height is 10 to 15 µm allowing measurements on highly corrugated samples • The whole tip as well as the rest of the sensor is fabricated out of one single crystal silicon (monolithic design) resulting in a high lateral stiffness and rigidity	Available Types Download Flyer

Rotated Tip	• General data like PointProbe® Plus • Tip is rotated 180° with respect to the center axis along the cantilever	Available Types Download Flyer

Tipless Cantilever	• no tip • highly doped to dissipate static charge • chemically inert • high mechanical Q-factor for high sensitivity	Available Types

Plateau Tip Series

Plateau Tips	• Plateau tip probes with a plateau diameter of 1.8 µm from stock • Single crystalline silicon • Option to customize plateau diameters	Available Types Download Flyer

Coated AFM Probes

NOTE: Coatings are available for selected types only

Gold coated	• 70 nm thick gold coating on detector side of the cantilever • 70 nm thick gold coating on both sides of the cantilever • Metallic conductivity of the tip • Detector side coating enhances the reflectivity of the laser beam	Available Types Download Flyer

Diamond coated	• 100 nm thick coating of polycrystalline diamond on the tipside • 200 nm thick coating of polycrystalline diamond on the tipside • Unsurpassed hardness of the tip	Available Types Download Flyer

Platinum-Iridium coated	• 25 nm thick layer of chromium and platinum iridium • Coating on both sides of the cantilever • Allows electrical measurements • Detector side coating enhances the reflectivity of the laser beam by a factor of 2 • Stress compensated and wear resistant	Available Types Download Flyer

Magnetic Coating	• Hard magnetic coating on the tip side (coercivity between 0.75 and 300 Oe, remanence magnetization between 80 and 300 emu/cm³) • Effective magnetic moment between 2.5 and 13 emu • Metallic electrical conductivity • Lowest possible guaranteed tip radius of curvature down to < 15 nm • Highest possible magnetic resolution down to better than 25 nm • Al coating on detector side of cantilever enhancing the reflectivity of the laser beam by a factor of about 2.5	Available Types Download Flyer

Special Developments

Special Developments	• On request we offer Special Developments and customized solutions • Availability and price on request.	Available Developments

Metrology Standards and Accessories

Metrology Standards	• Lateral-(xy)-Calibration Standard (2D100) • Lateral-(xy)-Calibration Standard (2D200) • Lateral-(xy)-Calibration Standard (2D300)	Download Flyer
Alignment Chip	• Flatness Standard (FLAT) • Step Height Standard (H8) • Alignment Chip • Evaluation Kit (KIT1, KIT2)