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Selected by Product Series

uniqprobe™

uniqprobe™
  • Small variations of force constant and resonance frequency 
  • Cantilevers made from stress free material leading to absolutely straight cantilevers 
  • Typical tip radius of curvature better than 10nm
  • Reduced drift for SPM applications in liquid environments
  • Chemically inert
  • High mechanical Q-factor for high sensitivity
x
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact qp-CONT Contact Mode ,
Biological Applications / Soft Contact Measurement
0.1 30
qp-SCONT Contact Mode ,
Biological Applications / Soft Contact Measurement
0.01 11
non-contact qp-BioT Non-Contact / Tapping Mode ,
Biological Applications / Soft Contact Measurement,
Contact Mode
CB1: 0.08
CB2: 0.3
CB1: 20
CB2: 50
qp-BioAC Non-Contact / Tapping Mode ,
Biological Applications / Soft Contact Measurement,
Contact Mode
CB1: 0.3
CB2: 0.1
CB3: 0.06
CB1: 90
CB2: 50
CB3: 30

Platinum Silicide AFM Probes

Platinum Silicide AFM Probes
  • Platinum silicide probe with excellent conductivity and good wear-out behavior
  • Typical tip radius 25 nm
  • Alignment grooves on backside of silicon holder chip
x
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PtSi-CONT Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
0.2 13
non-contact PtSi-NCH Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
42 330
special PtSi-FM Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
2.8 75

AdvancedTEC™

AdvancedTEC™
  • Monolithic Silicon-AFM-Probes for very high resolution imaging
  • Fits to all well known AFMs
  • Highly doped single crystal silicon (0.01-0.025 Ohm*cm)
  • Rectangular cantilever with trapezoidal cross section
  • Holder dimensions are 1.6 mm x 3.4 mm
  • REAL TIP VISIBILITY FROM TOP
  • Tip height 15-20 µm
  • Typical tip radius of curvature < 10 nm
  • Aspect Ratio of the last 1.5 µm of the tip > 4:1 (from front and side)
  • Tip shape is defined by real crystal planes resulting in highly reproducible geometries and extremely smooth surfaces
  • Also available with gold or platinum iridium coating
x
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact ATEC-CONT Contact Mode 0.2 15
ATEC-CONTAu Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
0.2 15
ATEC-CONTPt Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
0.2 15
non-contact ATEC-NC Non-Contact / Tapping Mode 45 335
ATEC-NCAu Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
45 335
ATEC-NCPt Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
45 335
special ATEC-EFM Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
2.8 85
ATEC-FM Force Modulation Mode 2.8 85
ATEC-FMAu Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
2.8 85

PointProbe® Series

PointProbe® Plus
  • Monolithic Silicon AFM Probes for very high resolution imaging
  • Fits to all well-known AFMs
  • Highly doped single crystal silicon (0.01-0.025 Ohm*cm)
  • Rectangular cantilever with trapezoidal cross section
  • Holder dimensions are 1.6 mm x 3.4 mm
  • Tip radius typically better than 7 nm
  • Improved consistency and resolution
  • Minimized variation in tip shape
x
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PPP-CONT Contact Mode 0.2 13
PPP-CONTR YES Contact Mode 0.2 13
PPP-CONTSC Contact Mode 0.2 25
PPP-CONTSCR YES Contact Mode 0.2 25
PPP-XYCONTR YES Contact Mode 0.2 13
PPP-ZEILR YES Contact Mode 1.6 27
non-contact PPP-NCH Non-Contact / Tapping Mode 42 330
PPP-NCHR YES Non-Contact / Tapping Mode 42 330
PPP-NCL Non-Contact / Tapping Mode 48 190
PPP-NCLR YES Non-Contact / Tapping Mode 48 190
PPP-NCST Non-Contact / Tapping Mode 7.4 160
PPP-NCSTR YES Non-Contact / Tapping Mode 7.4 160
PPP-QNCHR YES Non-Contact / Tapping Mode 42 330
PPP-SEIHR YES Non-Contact / Tapping Mode 15 130
PPP-XYNCHR YES Non-Contact / Tapping Mode 42 330
special PPP-FM Force Modulation Mode 2.8 75
PPP-FMR YES Force Modulation Mode 2 75
PPP-LFMR YES Contact Mode ,
Lateral / Friction Force Microscopy (LFM)
0.2 23
PPP-QFMR YES Force Modulation Mode 2.8 75
PointProbe® Plus XY-Alignment
  • When used together with the Alignment Chip, probes of three different cantilever lengths (e.g. PPP-NCHR; PPP-XYCONTR and PPP-FMR) can be exchanged without readjustment of the beam deflection laser
  • Monolithic Silicon AFM Probes for very high resolution imaging
  • Fits to all well-known AFMs
  • Highly doped single crystal silicon (0.01-0.025 Ohm*cm)
  • Rectangular cantilever with trapezoidal cross section
  • Tip radius typically better than 7 nm
  • Improved consistency and resolution
  • Minimized variation in tip shape
x PointProbe® Plus XY-Alignment AFM-Probe
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PPP-CONTSC Contact Mode 0.2 25
PPP-CONTSCAuD Contact Mode ,
Biological Applications / Soft Contact Measurement
0.2 25
PPP-CONTSCR YES Contact Mode 0.2 25
PPP-XYCONTR YES Contact Mode 0.2 13
non-contact PPP-NCL Non-Contact / Tapping Mode 48 190
PPP-NCLAuD Non-Contact / Tapping Mode ,
Biological Applications / Soft Contact Measurement
48 190
PPP-NCLR YES Non-Contact / Tapping Mode 48 190
PPP-SEIHR YES Non-Contact / Tapping Mode 15 130
PPP-XYNCHR YES Non-Contact / Tapping Mode 42 330
PPP-XYNCSTR YES Non-Contact / Tapping Mode 7.4 160
special PPP-FM Force Modulation Mode 2.8 75
PPP-FMR YES Force Modulation Mode 2 75
PPP-LFMR YES Contact Mode ,
Lateral / Friction Force Microscopy (LFM)
0.2 23
PPP-QFMR YES Force Modulation Mode 2.8 75
PPP-RT-FMR YES Force Modulation Mode 2.8 75
x XY-Alignment Compatible SuperSharpSilicon™ Types
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
non-contact SSS-NCLR YES Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
48 190
SSS-SEIHR YES Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
15 130
SSS-SEIH Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
15 130
SSS-NCL Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
48 190
special SSS-FM 2.8 75
SSS-FMR YES 2.8 75
x XY-Alignment Compatible High Aspect Ratio Probe Types
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
non-contact AR5-NCL Non-Contact / Tapping Mode ,
Trench Measurement
48 190
AR5-NCLR YES Non-Contact / Tapping Mode ,
Trench Measurement
48 190
x XY-Alignment Compatible Coated Probe Types
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PPP-CONTSCAu Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
0.2 25
PPP-CONTSCPt Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
0.2 25
non-contact CDT-NCLR YES Electrostatic Force Microscopy/ Electrical Measurement 72 210
DT-NCLR YES Non-Contact / Tapping Mode ,
Nanoindentation
72 210
PPP-NCLAu Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
48 190
PPP-NCLPt 48 190
special CDT-FMR YES Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
6.2 105
DT-FMR YES Force Modulation Mode ,
Nanoindentation
6.2 105
PPP-EFM Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
2.8 75
PPP-FMAu Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
2.8 75
PPP-LC-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
PPP-LM-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
PPP-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
PPP-QLC-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
SSS-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
SSS-QMFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
x XY-Alignment Compatible Tipless Cantilever Probe Types
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
non-contact PL2-NCL Non-Contact / Tapping Mode 48 190
PL2-NCLR YES Non-Contact / Tapping Mode 48 190
TL-NCL Non-Contact / Tapping Mode 48 190
special PL2-FM Force Modulation Mode 2.8 75
PL2-FMR YES Force Modulation Mode 2.8 75
TL-FM Force Modulation Mode 2.8 75
SuperSharpSilicon™
  • For enhances resolution of micro roughness and nanostructures
  • Tip radius is typically better than 2 nm
x
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
non-contact SSS-NCHR YES Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
42 330
SSS-NCLR YES Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
48 190
SSS-SEIHR YES Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
15 130
SSS-SEIH Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
15 130
SSS-NCL Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
48 190
SSS-NCH Non-Contact / Tapping Mode ,
Enhanced Resolution Imaging
42 330
special SSS-FM 2.8 75
SSS-FMR YES 2.8 75
SSS-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
SSS-QMFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
High Aspect Ratio
  • The length of the high aspect portion of the tip is larger than 1.5 µm or 2 µm respectively
  • Special tips are available to compensate the tilt of the scanner-head
  • The tip radii are typically better than 10 nm. We guarantee at least 15 nm
  • The overall tip height is 10 to 15 µm allowing measurements on highly corrugated samples
  • The whole tip as well as the rest of the sensor is fabricated out of one single crystal silicon (monolithic design) resulting in a high lateral stiffness and rigidity
x
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
non-contact AR10-NCH Non-Contact / Tapping Mode ,
Trench Measurement
42 330
AR10-NCHR YES Non-Contact / Tapping Mode ,
Trench Measurement
42 330
AR10T-NCH Non-Contact / Tapping Mode ,
Trench Measurement
42 330
AR10T-NCHR YES Non-Contact / Tapping Mode ,
Trench Measurement
42 330
AR5-NCH Non-Contact / Tapping Mode ,
Trench Measurement
42 330
AR5-NCHR YES Non-Contact / Tapping Mode ,
Trench Measurement
42 330
AR5-NCL Non-Contact / Tapping Mode ,
Trench Measurement
48 190
AR5-NCLR YES Non-Contact / Tapping Mode ,
Trench Measurement
48 190
AR5T-NCH Non-Contact / Tapping Mode ,
Trench Measurement
42 330
AR5T-NCHR YES Non-Contact / Tapping Mode ,
Trench Measurement
42 330
Rotated Tip
  • General data like PointProbe® Plus
  • Tip is rotated 180° with respect to the center axis along the cantilever
x
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PPP-RT-CONTR YES Contact Mode 0.2 13
non-contact PPP-RT-NCHR YES Non-Contact / Tapping Mode 42 330
special PPP-RT-FMR YES Force Modulation Mode 2.8 75
Tipless Cantilever
  • no tip
  • highly doped to dissipate static charge
  • chemically inert
  • high mechanical Q-factor for high sensitivity
x
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact TL-CONT Contact Mode 0.2 13
non-contact TL-NCH Non-Contact / Tapping Mode 42 330
TL-NCL Non-Contact / Tapping Mode 48 190
special TL-FM Force Modulation Mode 2.8 75

Plateau Tip

Plateau Tip
  • Plateau tip probes with a plateau diameter of 1.8 µm from stock
  • Single crystalline silicon
  • Option to customize plateau diameters
x
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PL2-CONT Contact Mode 0.2 13
PL2-CONTR YES Contact Mode 0.2 13
non-contact PL2-NCH Non-Contact / Tapping Mode 42 330
PL2-NCHR YES Non-Contact / Tapping Mode 42 330
PL2-NCL Non-Contact / Tapping Mode 48 190
PL2-NCLR YES Non-Contact / Tapping Mode 48 190
special PL2-FM Force Modulation Mode 2.8 75
PL2-FMR YES Force Modulation Mode 2.8 75

Coated AFM Probes

Gold Coating
  • 70 nm thick gold coating on detector side of the cantilever
  • 70 nm thick gold coating on both sides of the cantilever
  • Metallic conductivity of the tip
  • Detector side coating enhances the reflectivity of the laser beam
x AdvancedTEC™ Silicon-AFM-Probe: Gold coated
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact ATEC-CONTAu Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
0.2 15
non-contact ATEC-NCAu Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
45 335
special ATEC-FMAu Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
2.8 85
x PointProbe® Plus Gold coated
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PPP-CONTAu Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
0.2 13
PPP-CONTAuD Contact Mode ,
Biological Applications / Soft Contact Measurement
0.2 13
non-contact PPP-NCHAu Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
42 330
PPP-NCHAuD Non-Contact / Tapping Mode ,
Biological Applications / Soft Contact Measurement
42 330
PPP-NCLAu Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
48 190
PPP-NCLAuD Non-Contact / Tapping Mode ,
Biological Applications / Soft Contact Measurement
48 190
PPP-NCSTAu Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
7.4 160
PPP-NCSTAuD Non-Contact / Tapping Mode ,
Biological Applications / Soft Contact Measurement
7.4 160
special PPP-FMAu Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement ,
Biological Applications / Soft Contact Measurement
2.8 75
PPP-FMAuD Force Modulation Mode ,
Biological Applications / Soft Contact Measurement
2.8 75
Diamond coated
  • 100 nm thick coating of polycrystalline diamond on the tipside
  • 200 nm thick coating of polycrystalline diamond on the tipside
  • Unsurpassed hardness of the tip
x
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact CDT-CONTR YES Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
0.5 20
DT-CONTR YES Contact Mode 0.5 20
non-contact CDT-NCHR YES Electrostatic Force Microscopy/ Electrical Measurement 80 400
CDT-NCLR YES Electrostatic Force Microscopy/ Electrical Measurement 72 210
DT-NCHR YES Non-Contact / Tapping Mode ,
Nanoindentation
80 400
DT-NCLR YES Non-Contact / Tapping Mode ,
Nanoindentation
72 210
special CDT-FMR YES Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
6.2 105
DT-FMR YES Force Modulation Mode ,
Nanoindentation
6.2 105
Platinum-Iridium coated
  • 25 nm thick layer of chromium and platinum iridium
  • Coating on both sides of the cantilever
  • Allows electrical measurements
  • Detector side coating enhances the reflectivity of the laser beam by a factor of 2
  • Stress compensated and wear resistant
x AdvancedTEC™ Silicon-AFM-Probe: Platinum-Iridium coated
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact ATEC-CONTPt Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
0.2 15
non-contact ATEC-NCPt Non-Contact / Tapping Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
45 335
special ATEC-EFM Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
2.8 85
x PointProbe® Plus Platinum-Iridium coated
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
contact PPP-CONTPt Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
0.2 13
PPP-CONTSCPt Contact Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
0.2 25
non-contact PPP-NCHPt Electrostatic Force Microscopy/ Electrical Measurement 42 330
PPP-NCLPt 48 190
PPP-NCSTPt Electrostatic Force Microscopy/ Electrical Measurement 7.4 160
special PPP-EFM Force Modulation Mode ,
Electrostatic Force Microscopy/ Electrical Measurement
2.8 75
Magnetic Coating
  • Hard magnetic coating on the tip side (coercivity between 0.75 and 300 Oe, remanence magnetization between 80 and 300 emu/cm³)
  • Effective magnetic moment between 2.5 and 13 emu
  • Metallic electrical conductivity
  • Lowest possible guaranteed tip radius of curvature down to < 15 nm
  • Highest possible magnetic resolution down to better than 25 nm
  • Al coating on detector side of cantilever enhancing the reflectivity of the laser beam by a factor of about 2.5
x
Type Reflex
coating
Application Force constant
[N/m]
Resonance
frequency
[kHz]
special PPP-LC-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
PPP-LM-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
PPP-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
PPP-QLC-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
SSS-MFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75
SSS-QMFMR YES Force Modulation Mode ,
Magnetic Force Microscopy
2.8 75

Self-sensing + Self-actuating

Self-sensing + Self-actuating  
 
 
Akiyama-Probe is based on a quartz tuning fork combined with a micromachined cantilever. The great advantage of this novel probe is that one can benefit from both the tuning fork’s extremely stable oscillation and the silicon cantilever’s reasonable spring constant with one probe.
x
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
special Akiyama-Probe Self-sensing + self-actuating 5 50

Special Developments

Special Developments
  • On request we offer Special Developments and customized solutions
  • Availability and price on request.






Available Developments »
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Metrology Standards

Metrology Standards
  • Lateral-(xy)-Calibration Standard (2D200)
  • Lateral-(xy)-Calibration Standard (2D300)   

  • Flatness Standard (FLAT)
  • Step Height Standard (H8)
x
Type Application Force constant
[N/m]
Resonance
frequency
[kHz]
special 2D200 Transfer Standards
2D300 Transfer Standards
FLAT
H8 Transfer Standards
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