Flatness standard

The flatness standard consists of a superflat plane and is intended to be used to analyze and correct the scanner bow of the piezo-scanner used in most Scanning Force Microscopes. The standard consists of a quartz substrate with a chromium layer.


  • maximum peak to valley (p-v) distance of 10 nm on a 100 by 100 µm² area
  • FindMe pattern for easy localisation of active area
  • available with certificate

This standard has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this standard in accordance with international guidelines. Please contact Working Group 5.25 Scanning Probe Metrology at www.ptb.de directly.