Metrology Standards    Transfer Standards
Click on Order code for datasheet.

   Lateral-(xy)-Calibration Standard
Lateral-(xy)-Calibration Standard
2D100
• with 100 nm pitch
2D200
• with 200 nm pitch
2D300
• with 300 nm pitch

   Flatness Standard
FLAT
FLAT
• with 100 nm pitch
FLAT-CERT
• Flatness Standard FLAT
  with CERTIFICATION by
  the "Physikalisch Technische
  Bundesanstalt", Germany (PTB)

   Height Standard
Height Standard
H8
• Step height (z) standard
  with 8 nm nominal step height