Don’t forget to visit NANOSENSORS at booth 7-H at the MEMS Sensing & Network Systems 2017 conference and exhibition in Makuhari/Japan this week to learn more about the NANOSENSORS MSS (Membrane Type Surface Stress Sensors)
In this article the authors present a new method for torque magnetometry by using a commercially available membrane-type surface stress sensor (MSS) – the NANOSENSORS MSS. This sensor has a silicon membrane supported by four beams in which piezoresistive paths are integrated. Although originally developed as a gas sensor, it can be used for torque measurement by modifying its on-chip aluminum interconnections. The authors demonstrate the magnetic-torque measurement of submillimeter-sized crystals at low temperature and in strong magnetic fields. This MSS can observe de-Haas–van-Alphen oscillation, which confirms that it can be an alternative tool for self-sensitive microcantilevers.
Please follow this external link for the full article: http://journals.jps.jp/doi/10.7566/JPSJ.86.063002