A new video about NANOSENSORS™ Membrane-type Surface-stress Sensors (MSS) has been uploaded on the NANOSENSORS™ youtube channel.
The NANOSENSORS™ MSS is a piezoresistive nanomechanical sensor: a silicon membrane platform supported with four beams with integrated piezoresistors. This MEMS sensor is very versatile and primarily designed for R&D in the fields of electronic nose/ odor sensing/ olfactory system. It can also be utilized for material assessment application and measurements of physical parameters in, for example, torque magnetometry.
The new sensor chip shares the common MSS features, i.e., a membrane (or platform) supported with four beams on which piezoresistors are embedded at the fixed ends. In the newly developed sensor chip, however, those sensing beams are much longer than in the other two MSS chips (SD-MSS-1K and SD-MSS-1K2G) and form “bending” and “torsional” axes.
For two different functional axes, differently designed piezoresistors are embedded to effectively sense the torque generated by the sample. Considering a use at cryogenic temperatures, the resistance of the piezoresistor is designed relatively low and in the range of 0.3 – 1.2 kΩ. Each piezoresistor can be individually connected so that various measurement configurations can be arranged by the user.
Compared to the conventionally used piezoresistive cantilevers, the new type of Membrane-type Surface-stress Sensor “SD-MSS-1KTM” has many advantages:
easier to handle the chip
relatively robust structure
larger sample capability, etc.,
all of which facilitate preparations of measurement setup and increase turnaround of material assessment.
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