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2D300

Lateral-(XY)-Calibration Standard

The standard (2D300) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 300nm pitch etched into a silicon chip.

Features:

This standard has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this standard in accordance with international guidelines. Please contact Working Group 5.25 Scanning Probe Metrology at www.ptb.de directly.

 

 
Chip  
Chip size 5 x 7 mm²
Active area 100 x 100 µm²
The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area.
Lattice  
Pitch 300 nm
Accuracy of pyramid position 10nm
Accuracy of pitch (10x10 µm² scan) 0.1%
Accuracy of pitch (100x100 µm² scan) ±0.01%
Pyramids  
Edge length of square pyramids approx. 50 nm
Sidewall angle (versus wafer surface) 54.7°
Accuracy of sidewall angle 0.5
Depth of pyramids approx. 35 nm
Order Code Quantity Data sheet
2D300 1 enclosed



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