Lateral-(XY)-Calibration Grating available from the NANOSENSORS™ Special Developments List
The grating (2D300) is used for a very precise x-y-calibration of the scanning mechanism. The grating consists of a 2-dimensional lattice of inverted square pyramids with 300nm pitch etched into a silicon chip.
Features:
- 300 nm pitch
- high accuracy
This grating has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this grating in accordance with international guidelines. Please request further assistance from PTB working group 5.23 3D Nanometrologie directly - www.ptb.de.
Only available as long as supply lasts.
| Chip | |
|---|---|
| Chip size | 5 x 7 mm² |
| Active area | 100 x 100 µm² |
| The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area. | |
| Lattice | |
| Pitch | 300 nm |
| Accuracy of pyramid position | 10nm |
| Accuracy of pitch (10x10 µm² scan) | 0.1% |
| Accuracy of pitch (100x100 µm² scan) | ±0.01% |
| Pyramids | |
| Edge length of square pyramids | approx. 50 nm |
| Sidewall angle (versus wafer surface) | 54.7° |
| Accuracy of sidewall angle | 0.5 |
| Depth of pyramids | approx. 35 nm |
| Order Code | Quantity | Data sheet |
|---|---|---|
| 2D300 | 1 | enclosed |