2D200

The standard (2D200) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 200nm pitch etched into a silicon chip.

A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. NANOSENSORS™ will mediate a contract between the customer and PTB. Please ask for details.

Detailed Specifications:

Chip Chip size 5 x 7 mm² Active area 100 x 100 µm² The active area is located in the center of the chip and is surrounded by the FindMe structure. The lattice of inverted pyramids make up the active area. Lattice Pitch 200 nm Accuracy of pyramid position 10 nm Accuracy of pitch (10x10 µm² scan) 0.1% Accuracy of pitch (100x100 µm² scan) ±0.01% Pyramids Edge length of square pyramids approx. 100 nm Sidewall angle (versus wafer surface) 54.7° Accuracy of sidewall angle 0.5 Depth of pyramids approx. 70 nm

Order codes and shipping units:

Order Code	Quantity	Data Sheet	Calibration Certificate
2D200	1	enclosed	see above

For further information please contact your local distributor or NANOSENSORS™ directly.
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